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Last Update: October 1, 2008

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Optical Instruments

3D Deflectometry Work Program

Description

In a first phase, specification requirements from the end users will be gathered and a preliminary design will be made. After the first design phase research in algorithms will start and at the same time the hardware building will begin. On the algorithms side new methods will have to be investigated on how to retrieve surface shape data from the measured slope data in 3D. Ideas about reducing / eliminating measurement errors by measuring slope differences will be investigated as well. For the hardware the challenge is to create a stable and robust set-up. Furthermore the data acquisition speed has to be optimised in order to keep the measurement time as short as possible. In the first phase two hardware concepts will be realised: one that relies on optical scanning, and a second one for very large surfaces that will work with mechanical scanning. Both hardware and software concepts are being developed at reduced specification in order to have a first testing phase after 21 months. At the mid-term assessment the feasibility of the chosen solution will be demonstrated. After the first testing and integration the final design will be completed and hard- and software will be developed to full specification. In this development phase creating proper data becomes ve ry imp o rtant. The last month of the project will be used to extensive testing / verification by the end users and also by calibrations. For introducing the new measurement method and equipment it is always necessary to compare the new method with existing standards. If there are no suitable standards, the correctness of the final measuring result must be ensured by other means.

Workplan

The work is divided into 10 Work Packages:

WP1:Preliminary Specification and Design
WP2:Algorithm Research
WP3:Hardware and Hardware control software research
WP4:Integration and feasibility assessment
WP5:Final Design and Specification
WP6:Algorithm R&D
WP7:Hardware and Hardware control software R&D
WP8:System Integration, End user test and Calibration
WP9:Exploitation
WP10:Management
Workpackages

Milestones and expected results

Project results are:

  • A 3D inspection technology for large (600x1000 mm) flat, slightly curved surfaces;
  • Contactless measurement of 3D topographies with accuracy of 10 nm;
  • A competitively priced instrument;
  • 3D algorithms;
  • Reduction of 7 hrs measuring time with mechanical stylus profiler to <30 mins.

Basic Milestones are:

  • Working hardware and software;
  • Two types of deflectometers available;
  • Redesign of optomechanical and electronic parts for performance improvement;